B.TECH - Semester 7 mems Question Paper 2013 (dec)
Practice authentic previous year university questions for better exam preparation.
Sample Questions
- 706.2 MEMS (AT) (Elective IV) Time : 3 Hours Max. Marks : 100 Answer all questions. Each question carries 2 marks.
- Give any three materials used in MEMS fabrication.
- Enumerate the essential components of MEMS.
- What are the mechanical properties of thin films?
- Comment on the various types of beams in MEMS.
- Explain the function of infrared sensors.
- Summarize the advantages of electrostatic sensing and actuation.
- Discuss the advantages of magnetic actuation.
- Explain the principle of tactile sensor with an example
- State the principle of piezoelectric accelerometer.
- Write a brief note on PMMA. PART - B Answer any one full question from each Module. Each question carries 20 marks. Module-I
- (i) Explain the characteristics of MEMS devices. ..... 10 (ii) Write a note on microfabrication. ..... 10 OR
- (i) Explain the chemicals used for wet anisotropic etching. ..... 10 (ii) Illustrate the DRIE process with a neat sketch. ..... 10 Module - II
- Give the relation between stress and strain relevant diagrams and equations ..... 20 OR
- Explain the relation between tensile stress and strain. List the mechanical properties of silicon relevant to MEMS fabrication. ..... 20 Module - III
- (i) Compare and contrast the characteristics of electrostatic and thermal bimetallic actuation. ..... 10 (ii) Explain the working principle of Infrared sensor array with necessary diagrams ..... 10 OR
- Discuss in detail the fabrication process of sealed cavity pressure sensor. ..... 20 Module - IV
- (i) Summarize the fabrication process of silicon accelerometer with parylene beams. ..... 10 (ii) Describe Fluorocarbon and PMMA in detail. OR2
- (i) Explain the design and fabrication process of a magnetic coil. (ii) Describe the principle of operation of magnetic actuation and the deposition process of magnetic materials. ( $4 \times 20=80$ Marks)