B.TECH - Semester 7 mems Question Paper 2020 (sep)
Practice authentic previous year university questions for better exam preparation.
Sample Questions
- Differentiate between microsensors and microactuators with examples.
- Define DRIE.
- List any four advantages of miniaturization.
- Define Poisson's Ratio.
- Why intrinsic stress is important for MEMS devices.
- List out the advantages of electrostatic sensing and actuation.
- Enumerate the applications of pressure sensors.
- Differentiate between thermal conduction and convection.
- Define Gauge factor.
- What are the characteristics of PDMS in MEMS. PART - B Answer any one full question from each module. Each questions carries 20 marks.
- (a) With a neat block diagram explain the components of a microsystem.
- (b) Explain in detail the multidisciplinary nature of MEMS and microsystems with necessary examples. OR
- (a) Discuss the properties of materials used in MEMS fabrication.
- (b) Describe different types of etching methods in MEMS. Module - II
- Write short notes on the following. (a) Tortional deflection
- Write short notes on the following. (b) Resonance and Quality Factor
- Write short notes on the following. (c) Intrinsic stress OR
- (a) Illustrate the physical and chemical properties of silicon for different crystal plane orientations.
- (b) Analyze the internal force distribution inside a micromechanical element using Newton's Law of Motion.
- (a) Explain pull-in effect of parallel plate capacitor. Also Derive an expression for pull-in voltage of parallel-plate capacitor.
- (b) With necessary diagrams, explain in detail about the transverse comb-drive device.
- (a) Discuss in detail about the Thermal Bimorph Principle in microstructures with necessary diagrams.
- (b) Explain the principle of operation of thermal sensors with necessary diagrams.
- (a) Explain the working principle of piezoelectric sensing and Actuation.
- (b) Illustrate the techniques involved in the fabrication of a micro magnetic system. OR
- Summarize the properties , advantages and applications of different types of polymers that have been widely used in MEMS applications. 3