B.TECH - Semester 7 mems Question Paper 2019 (jul)
Practice authentic previous year university questions for better exam preparation.
- (a) Define beam. Name the types of beams and point out the possible boundary conditions.
- (b) Describe the flexural beam bending analysis under simple loading conditions.
- (a) Give the schematic diagram of a fixed free cantilever beam spring under loading condition.
- (b) Describe the mechanical deformation of a coil spring under a point loading force Module - III
- (a) With suitable diagram, explain the working principle of parallel plate capacitor and the equilibrium position of electrostatic actuator under bias. 10
- (a) With schematic diagram, explain bulk micromachined parallel plate capacitor as differential mode tactile sensor
- (b) Summarize the applications of comb drive devices.
- (b) With neat diagram, describe the fabrication process of PZT piezoelectric acoustic sensor.
- Give notes on: (a) Polymide (b) LCP. OR
- 706.2 : MEMS (AT) (Elective IV) Time : 3 Hours Max. Marks : 100 PART - A Answer all questions :Each question carries 2 marks
- Define MEMS.
- What is meant by Anisotropic Wet Etching?.
- Define tensile stress and tensile strain.
- Define Spring Constant. What is its relevance in MEMS.
- What is the principle of Electrostatic sensing?
- Name any three thermal sensors.
- Write a brief note on PDMS.
- Write the principle of magnetic actuator with an example.
- Explain the need for Thermal Sensing.
- Give the principle of Flow Rate sensor. PART - B Answer any one full questions from each Module. Each question carries 20 marks
- (a) Describe the rules of anisotropic etching for a Simple Structures. 10
- (b) Describe the rules of anisotropic etching for Complex Structures. 10 OR
- Explain (a) DRIE Process 10 (b) Surface micromachining process 10 Module - II
- (b) Describe the pull in effect of parallel plate actuators. 10 OR 2 G - 3793
- (a) Discuss the properties of the materials used in the fabrication of piezoelectric sensors.
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